Application of gel permeation chromatography with photodiode array detection for monitoring of microlithographic processes

Library Number:
981294
Author(s):
Gitsov, Ivan
Source:
Int. GPC Symp. ''89
Content Type:
Scientific Publications
Content Subtype:
Books/Chapters
Compounds:
novolac resins, photoresist
Matrix:
integrated circuits
Column:
µStyragel 10^3 Å N/A Steel 7.8 mm 300 mm

Title Format File Size
981294 PDF 564.46kB